Fabrication Engineering at the Micro- And Nanoscale

Fabrication Engineering at the Micro- And Nanoscale - The Oxford Series in Electrical and Computer Engineering

Fourth edition

Paperback (20 Dec 2012)

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Publisher's Synopsis

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Book information

ISBN: 9780199861224
Publisher: OUP USA
Imprint: Oxford University Press
Pub date:
Edition: Fourth edition
DEWEY: 621.38152
DEWEY edition: 23
Language: English
Number of pages: 688
Weight: 1075g
Height: 192mm
Width: 236mm
Spine width: 26mm